| Novellus (SpeedFam-IPEC) |
| Avanti 37M & 472 |
| AvantiGaard 676 & 776 |
| Momentum |
| Auriga & Auriga-C |
| Novellus (SpeedFam-IPEC) |
| EP002 & EPO Series |
| FREX-200 Series |
| FREX-300 / SJI Series (300mm) |
| Applied Materials |
| Mirra / Ontrak / DNS Series |
| MirraMesa Series |
| Reflexion / LK Series (300mm) |